Mechanical properties of silicon oxide films deposited by PECVD-TEOS for application in MEMS structures and sensors
Lucas Gonçalves Dias Gonçalves Antônio Nélson Rodrigues da Silva; C.F Alfano; J. C Santos; Nilton Itiro Morimoto 1962-; International Symposium on Microelectronics Technology and Devices SBMICRO 2002, Porto Alegre, 2002 (17 2002 Porto Alegre)
Morimoto, N.I.; Ribas, R.P.; Verdonck, P.B. , eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002
Implementation of an optical integrated pressure sensor and experimental results
Acácio Luiz Siarkowski Douglas Anderson Pereira Bulla; Nilton Itiro Morimoto 1962-; International Symposium on Microelectronics Technology and Devices SBMICRO (17 2002 Porto alegre)
Morimoto, N.I.; Ribas, P.R.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002
Influence of the back gate voltage on the total series resistence of fully depleted SOI MOSFETs at 300 K and 77 K
Aparecido Sirley Nicolett João Antonio Martino 1959-; Eddy Simoen; Cor Claeys; International Symposium on Microelectronics Technology and Devices SBMICRO (17 2002 Porto Alegre, RS)
Morimoto, N.I.; Ribas, R.P.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002
Effect of stencil alignment on the solder beading in SMT process
Flávio Sousa Silva Mauricio Massazumi Oka; International Symposium on Microelectronics Technology and Devices SBMICRO 2002, Porto Alegre, 2002 (17 2002 Porto Alegre)
Morimoto, N.I.; Ribas, P.R.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002
Behavior of graded-channel fully depleted SOI NMOSFET at high temperatures
Milene Galeti Marcelo Antonio Pavanello; João Antonio Martino 1959-; International Symposium on Microelectronics Technology and Devices SBMICRO (17 2002 Porto Alegre, RS)
Morimoto, N.I.; Ribas, P.R.; Verdonck, P.B., eds Microelectronics Technology and Devices SBMICRO 2002 Pennington : The Electrochemical Society, 2002
Daniela Garrote Lantin Edyr Onoda; Luís da Silva Zambom; Ronaldo Domingues Mansano 1964-; International Symposium on Microelectronics Technology and Devices SBMICRO (18th 2003
Martino J.A. ; Pavanello, M.A. ; Morimoto, N.I. eds Microelectronic Technology and Devices SBMicro 2003 Pennington : Electrochemical Society, 2003
Electrochemical process for silicon tips fabrication
Michel Oliveira da Silva Dantas Elisabete Galeazzo 1964-; Henrique Estanislau Maldonado Peres; Francisco Javier Ramírez Fernandez 1944-; International Symposium on Microelectronics Technology and Devices SBMICRO 2003, São Paulo / (18th 2003 São Paulo)
Martino J.A. ; Pavanello, M.A. ; Morimoto, N.I. eds Microelectronic Technology and Devices SBMicro 2003 Pennington : Electrochemical Society, 2003
Simulation of anisotropic etching of silicon using a cellular automata model
Jose Pinto de Oliveira Junior Marcelo Nelson Paez Carreño 1962-; International Symposium on Microelectronics Technology and Devices SBMICRO (2008 Gramado, RS)
SBMICRO 2008: Anais Pennington: The Electrochemical Society, 2008