Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition
Bronneberg, A. C. ; Kang, X. ; Palmans, J. ; Janssen, P. H. J. ; Lorne, T. ; Creatore, M. ; van de Sanden, M. C. M.
Journal of applied physics, 2013-08, Vol.114 (6) [Periódico revisado por pares]United States
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