0.13 μm pattern delineation using KrF excimer laser light
IMAI, A ; ASAI, N ; UENO, T ; HASEGAWA, N ; TANAKA, T ; TERASAWA, T ; OKAZAKI, S
Japanese Journal of Applied Physics, 1994-12, Vol.33 (12B), p.6816-6822 [Periódico revisado por pares]Tokyo: Japanese journal of applied physics
Texto completo disponível