A method for deposition rate estimation on a low-cost home-built DC sputter system
H. M. Pinto Renato Goulart Jasinevicius; G. A Cirino; Symposium on Microelectronics Technology and Devices - SBMicro (36th. : 2022 : Porto Alegre, RS)
Piscataway, NJ, USA IEEE 2022
Localização: EESC - Esc. Engenharia de São Carlos (PROD-025282 )(Acessar)