Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology

Pauliac-Vaujour, Sebastien ; Wacquez, Romain ; Vizioz, Christian ; Chevolleau, Thierry ; Pierre, Mathieu ; Previtali, Bernard ; Comboroure, Corinne ; Bove, Nadine ; Roche, Benoit ; Vinet, Maud ; Jehl, Xavier ; Sanquer, Marc ; Sixt, Pierre

Japanese Journal of Applied Physics, 2011-06, Vol.50 (6), p.06GF15-06GF15-5 [Periódico revisado por pares]

The Japan Society of Applied Physics

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