Carbon contamination in an etching reactor using electron cyclotron resonance plasma and the effect of a N 2 addition

Miwa, Kazuhiro ; Aoyama, Masaaki ; Higuchi, Kenichi ; Inoue, Minoru ; Kojiri, Hidehiro ; Nagase, Kunihiko

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1997, Vol.15 (3), p.1413-1417 [Periódico revisado por pares]

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