Nanoimprint lithography using disposable biomass template
Hanabata, Makoto ; Takei, Satoshi ; Sugahara, Kigen ; Nakajima, Shinya ; Sugino, Naoto ; Kameda, Takao ; Fukushima, Jiro ; Matsumoto, Yoko ; Sekiguchi, Atsushi Cheng, Joy Y ; Bencher, Christopher
SPIE 2016
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