Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper

Crespi, Ângela Elisa ; Ballage, Charles ; Hugon, Marie Christine ; Robert, Jacques ; Lundin, Daniel ; Vickridge, Ian ; Alvarez, José ; Minea, Tiberiu

Thin solid films, 2020-10, Vol.712, p.138319, Article 138319 [Periódico revisado por pares]

Elsevier B.V

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