Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Hofmann, Sven ; van Gils, Koen ; van der Linden, Steven ; Iseni, Sylvain ; Bruggeman, Peter

The European physical journal. D, Atomic, molecular, and optical physics, 2014-03, Vol.68 (3), p.56-56, Article 56 [Periódico revisado por pares]

Berlin/Heidelberg: Springer Berlin Heidelberg

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