Idioma:

Electron, ion, and photon beam technology and nanofabrication

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (51st 2007 Denver, CO)

Journal of Vacuum Science & Technology B 2nd ser., v. 25, no.6, 2007

Localização: IF - Instituto de Física (J.Vac.Sci.Technol. v.25(6)2007 )(Acessar)

Título:
Electron, ion, and photon beam technology and nanofabrication
Autor: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (51st 2007 Denver, CO)
Assuntos: Photolithography -- Congresses; Lithography, Electron beam -- Congresses; Ion beam lithography -- Congresses; X-ray lithography -- Congresses; Nanotechnology -- Congresses; NANOTECNOLOGIA (CONGRESSOS)
É parte de: Journal of Vacuum Science & Technology B 2nd ser., v. 25, no.6, 2007
Editor: Melville, N.Y. American Institute of Physics
Data de criação/publicação: 2007
Formato: 1v.
Idioma: Inglês

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