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Mechanism of the Production of Concentric Spread Plasma

Sumita, Masahiro ; Watanabe, Seiichi

Japanese Journal of Applied Physics, 2001-02, Vol.40 (2R), p.819 [Periódico revisado por pares]

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Título:
Mechanism of the Production of Concentric Spread Plasma
Autor: Sumita, Masahiro ; Watanabe, Seiichi
É parte de: Japanese Journal of Applied Physics, 2001-02, Vol.40 (2R), p.819
Descrição: Concentric spread plasma (CSP) is a new type of surface-wave-excited plasma that is disc-shaped and that expands concentrically with increasing microwave power. This study compares the results obtained experimentally with those obtained by three-dimensional electromagnetic wave simulations taking into account the energy absorbed by the plasma. It is shown here that at pressures above 100 Pa, the plasma is produced and sustained by Joule heating.
Idioma: Inglês

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