A thin film force sensor on AISI 5140 steel surface with multilayer SI3N4/AL2O3 film as insulation structure

Li, Xuerui ; Yu, Gongqi ; Zhang, Haiping ; Cao, Zhen ; Li, Wenbo ; Li, Jiongli ; Wang, Xudong

Thin solid films, 2023-06, Vol.775, p.139797, Article 139797 [Periódico revisado por pares]

Elsevier B.V

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