Effects of silver catalyst concentration in metal assisted chemical etching of silicon

Venkatesan, Ragavendran ; Arivalagan, Muthu Kumar ; Venkatachalapathy, Vishnukanthan ; Pearce, Joshua M. ; Mayandi, Jeyanthinath

Materials letters, 2018-06, Vol.221, p.206-210 [Periódico revisado por pares]

Amsterdam: Elsevier B.V

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