Fabrication of nanowire by conventional MEMS process and application for sensing bio-species
AKIYAMA, Sho ; GINET, Patrick ; CHENG, Yi-Tung ; TAKAMA, Nobuyuki ; KIM, Beomjoon
SEISAN KENKYU, 2010/05/01, Vol.62(3), pp.249-254Institute of Industrial Science The University of Tokyo
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