Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy filmsMarco Isaías Alayo Chávez 1971- Inés Pereyra 1947-; Wanderla Luis Scopel; Márcia Carvalho de Abreu FantiniThin Solid Films Lausanne v. 402, n. 1-2, p. 154-161, 2002Lausanne 2002Acesso online |
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2 |
Material Type: Artigo
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On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy filmsMarco Isaías Alayo Chávez 1971- Inés Pereyra 1947-; Wanderla Luis Scopel; Márcia Carvalho de Abreu FantiniThin Solid Films Lausanne v. 402, n. 1-2, p. 154-161, 2002Lausanne 2002Acesso online |
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3 |
Material Type: Artigo de Congresso
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Comparison of the structural properties of the PECVD SIOXNY dielectric layer with the interface electrical properties in SI/SIOXNY/AL capacitorsKatia Franklin Albertin Márcia Carvalho de Abreu Fantini; Inés Pereyra 1947-; Encontro da SBPMat (3. 2004 Foz do Iguaçu)Program São Carlos: SBPMat, 2004São Carlos SBPMat 2004Acesso online |
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4 |
Material Type: Artigo de Congresso
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The structural properties of the protective layer of microlamps under polarizationVinicius Roberto de Sylos Cassimiro Márcia Carvalho de Abreu Fantini; Inés Pereyra 1947-; Marcelo Nelson Páez Carreño 1962-; Marco Isaías Alayo Chávez 1971-; Gustavo Pamplona Rehder 1979-; Rubens Martins Cunha Junior; Nicolas Trcera; Brazilian Workshop on Semiconductor Physics Ago 14-18, 2017 Maresias, São Paulo, SP 18thProceedings Science BWSP São Paulo, 2017 v. 1, 4 p.São Paulo 2017Acesso online |
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5 |
Material Type: Artigo de Congresso
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Study of silicon oxynitride films with low mechanical stressDenise Criado Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-; Márcia Carvalho de Abreu Fantini; Encontro da SBPMat (3. 2004 Foz do Iguaçu)Program São Carlos: SBPMat, 2004São Carlos SBPMat 2004Acesso online |
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6 |
Material Type: Artigo de Congresso
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Xanes characterization in PECVD-SiOxNy filmsDenise Criado Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-; Márcia Carvalho de Abreu Fantini; Encontro da SBPMat (3. 2004 Foz do Iguaçu)Program São Carlos: SBPMat, 2004São Carlos SBPMat 2004Acesso online |
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7 |
Material Type: Artigo
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Structural analysis of silicon oxynitride films deposited by PECVDDenise Criado Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-; Márcia Carvalho de Abreu FantiniMaterials Science and Engineering B v. 112, n. 2-3, p. 123-127, 2004São Paulo 2004Acesso online |
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8 |
Material Type: Artigo
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Study of the mechanical and structural properties of silicon oxynitride films for optical applicationsDenise Criado Marco Isaías Alayo Chávez 1971-; Márcia Carvalho de Abreu Fantini; Inés Pereyra 1947-Journal of non-crystalline solids v. 352, n. 23-25, p. 2319-2323, 2006Amsterdan 2006Acesso online |
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9 |
Material Type: Artigo
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Local bonding in PECVD-"SiO IND.X" "N IND.Y" filmsDenise Criado Marco Isaías Alayo Chávez 1971-; Márcia Carvalho de Abreu Fantini; Inés Pereyra 1947-Journal of Non-Crystalline Solids Amsterdan v. 352, n. 9-20, p. 1298-1302, 2006Amsterdan 2006Acesso online |
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10 |
Material Type: Artigo
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Structural analysis of silicon oxynitride films deposited by PECVDDenise Criado Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-; Márcia Carvalho de Abreu FantiniMaterials Science and Engineering B v. 112, n. 2-3, p. 123-127, 2004São Paulo 2004Acesso online |