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Optimal device structure for Pipe-shaped BiCS Flash memory for ultra high density storage device with excellent performance and reliability
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Optimal device structure for Pipe-shaped BiCS Flash memory for ultra high density storage device with excellent performance and reliability

Ishiduki, M. ; Fukuzumi, Y. ; Katsumata, R. ; Kito, M. ; Kido, M. ; Tanaka, H. ; Komori, Y. ; Nagata, Y. ; Fujiwara, T. ; Maeda, T. ; Mikajiri, Y. ; Oota, S. ; Honda, M. ; Iwata, Y. ; Kirisawa, R. ; Aochi, H. ; Nitayama, A.

2009 IEEE International Electron Devices Meeting (IEDM), 2009, p.1-4

IEEE

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