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Material Type: Recurso Textual
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Papers from the International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling : 6-9 May 2007, Napa, California
International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (2007 : Napa Valley, Calif.)
Journal of vacuum science & technology. B, Microelectronics and nanometer structures 2nd ser., v. 26, no. 1 (DLC) 94657460 (OCoLC)23276603
New York : Published by AVS through the American Institute of Physics 2008
Localização:
IF - Instituto de Física
(J.Vac.Sci.Technol.B v.26(1)200 )(Acessar)
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