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Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry"
Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry"
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Measurement and simulation data for "Optical form measurement employing a tiltable line scanning low coherence interferometer for annular subaperture stitching interferometry"

Schake, Markus ; Riebeling, Jörg ; Lehmann, Peter ; Ehret, Gerd

Physikalisch-Technische Bundesanstalt (PTB) 2021

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