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A harmonic method for measuring electron temperature and ion density using an asymmetric double probe
A harmonic method for measuring electron temperature and ion density using an asymmetric double probe
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A harmonic method for measuring electron temperature and ion density using an asymmetric double probe

Eo, Hyundong ; Park, Sung Joon ; Kim, Ju Ho ; Chung, Chin-Wook

Plasma sources science & technology, 2024-02, Vol.33 (2), p.25028 [Periódico revisado por pares]

IOP Publishing

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2
A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current
A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current
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A method for measuring electron temperature and ion density with immunity to RF fluctuation and ion current

Eo, Hyundong ; Kim, Kyung-Hyun ; Lee, Moo-Young ; Kim, Ju Ho ; Chung, Chin-Wook

Physics of plasmas, 2023-02, Vol.30 (2) [Periódico revisado por pares]

Melville: American Institute of Physics

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3
Floating probe for electron temperature and ion density measurement applicable to processing plasmas
Floating probe for electron temperature and ion density measurement applicable to processing plasmas
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Floating probe for electron temperature and ion density measurement applicable to processing plasmas

Lee, Min-Hyong ; Jang, Sung-Ho ; Chung, Chin-Wook

Journal of applied physics, 2007-02, Vol.101 (3), p.033305-033305-6 [Periódico revisado por pares]

United States: American Institute of Physics

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4
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath
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Improvement of the floating probe method for ion density and electron temperature measurement without compensation due to voltage reduction across the sheath

Lee, Moo-Young ; Seo, Jong-In ; Eo, Hyundong ; Kim, Tae-Woo ; Jung, Jiwon ; Lim, Yeong-Min ; Chung, Chin-Wook

Plasma sources science & technology, 2021-06, Vol.30 (6), p.65006 [Periódico revisado por pares]

IOP Publishing

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5
Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas
Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas
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Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas

Kim, Young-Cheol ; Jang, Sung-Ho ; Oh, Se-Jin ; Lee, Hyo-Chang ; Chung, Chin-Wook

Review of scientific instruments, 2013-05, Vol.84 (5), p.053505-053505 [Periódico revisado por pares]

United States

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6
Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma
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Temporal evolution of two-dimensional electron temperature and ion flux on a substrate in a pulsed-power inductively coupled plasma

Park, Il-seo ; Kim, Dong-Hwan ; Kim, Kyung-Hyun ; Chung, Chin-Wook

Physics of plasmas, 2017-05, Vol.24 (5) [Periódico revisado por pares]

Melville: American Institute of Physics

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7
Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source
Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source
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Non-invasive probe diagnostic method for electron temperature and ion current density in atmospheric pressure plasma jet source

Kim, Young-Cheol ; Kim, Yu-Sin ; Lee, Hyo-Chang ; Moon, Jun-Hyeon ; Chung, Chin-Wook ; Kim, Yunjung ; Cho, Guangsup

Physics of plasmas, 2015-08, Vol.22 (8) [Periódico revisado por pares]

Melville: American Institute of Physics

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8
Measurement of electron temperature and ion density using the self-bias effect in plasmas
Measurement of electron temperature and ion density using the self-bias effect in plasmas
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Measurement of electron temperature and ion density using the self-bias effect in plasmas

Hwang, Kwang-Tae ; Oh, Se-Jin ; Choi, Ik-Jin ; Chung, Chin-Wook

Physics of plasmas, 2010-06, Vol.17 (6), p.063501-063501-4 [Periódico revisado por pares]

United States: American Institute of Physics

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9
Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas
Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas
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Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas

Oh, Se-Jin ; Choi, Ik-Jin ; Kim, Jin-Yong ; Chung, Chin-Wook

Measurement science & technology, 2012-08, Vol.23 (8), p.85001-1-6 [Periódico revisado por pares]

IOP Publishing

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10
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
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Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

Han, Duksun ; Lee, Hyo-Chang ; Bang, Jin-Young ; Chung, Chin-Wook ; Moon, Se Youn

Current Applied Physics, 2015, 15(9), , pp.1036-1041 [Periódico revisado por pares]

Elsevier B.V

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