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Material Type: Artigo
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The Mechanism of Chemical Vapor Deposition of Cubic Boron Nitride Films from Fluorine‐Containing SpeciesZhang, W. J. ; Chan, C. Y. ; Meng, X. M. ; Fung, M. K. ; Bello, I. ; Lifshitz, Y. ; Lee, S. T. ; Jiang, X.Angewandte Chemie, 2005-07, Vol.117 (30), p.4827-4831 [Periódico revisado por pares]Texto completo disponível |