Materials science of microelectromechanical systems (MEMS) devices
Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices 1998 Boston Arthur H Heuer; Jacobs, S. Joshua
Materials Research Society Symposia Proceedings New York, North-Holland, 1981-
New York North-Holland 1981-
Localização:
IFSC - Inst. Física de São Carlos
(P 530.418 M425 v.546 )(Acessar)