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Low Temperature Hydrophilic SiC Wafer Level Direct Bonding for Ultrahigh-Voltage Device Applications
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Low Temperature Hydrophilic SiC Wafer Level Direct Bonding for Ultrahigh-Voltage Device Applications

Zhang, Wenting ; Zhang, Caorui ; Wu, Junmin ; Yang, Fei ; An, Yunlai ; Hu, Fangjing ; Fan, Ji

Micromachines (Basel), 2021-12, Vol.12 (12), p.1575 [Periódico revisado por pares]

Switzerland: MDPI AG

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