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High-Pressure Deuterium Annealing Effect on Nanoscale Strained CMOS Devices
High-Pressure Deuterium Annealing Effect on Nanoscale Strained CMOS Devices
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High-Pressure Deuterium Annealing Effect on Nanoscale Strained CMOS Devices

Cho, Sung-Man ; Lee, Jeong-Hyun ; Chang, Man ; Jo, Min-Seok ; Hwang, Hyun-Sang ; Lee, Jong-kon ; Hwang, Sung-Bo ; Lee, Jong-Ho

IEEE transactions on device and materials reliability, 2008-03, Vol.8 (1), p.153-159 [Peer Reviewed Journal]

New York: IEEE

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