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1
On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma
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On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma

Kim, Ju-Ho ; Chung, Chin-Wook

Physics of plasmas, 2020-02, Vol.27 (2), p.023503 [Periódico revisado por pares]

Melville: American Institute of Physics

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2
Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna
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Effect of electron kinetics on plasma density in inductively coupled plasmas using a passive resonant antenna

Kim, Ju-Ho ; Chung, Chin-Wook

Physics of plasmas, 2020-06, Vol.27 (6), p.063511 [Periódico revisado por pares]

Melville: American Institute of Physics

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3
Effect of the RF bias on the plasma density in an argon inductively coupled plasma
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Effect of the RF bias on the plasma density in an argon inductively coupled plasma

Lee, Ho-won ; Kim, Kyung-Hyun ; Seo, Jong In ; Chung, Chin-Wook

Physics of plasmas, 2020-09, Vol.27 (9), p.093508 [Periódico revisado por pares]

Melville: American Institute of Physics

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4
Hysteresis control using a DC magnetic field in an argon inductively coupled plasma
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Hysteresis control using a DC magnetic field in an argon inductively coupled plasma

Kim, Tae-Woo ; Lee, Moo-Young ; Chung, Chin-Wook

Physics of plasmas, 2021-12, Vol.28 (12), p.123518 [Periódico revisado por pares]

Melville: American Institute of Physics

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5
Ultrathin gutter layer for high-performance thin-film composite membranes for CO2 separation
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Ultrathin gutter layer for high-performance thin-film composite membranes for CO2 separation

Yoo, Myung Jin ; Kim, Kyung Hyun ; Lee, Jun Hyeok ; Kim, Tae Woo ; Chung, Chin Wook ; Cho, Young Hoon ; Park, Ho Bum

Journal of membrane science, 2018-11, Vol.566, p.336-345 [Periódico revisado por pares]

Elsevier B.V

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6
Control of the spatial distribution of ion flux in dual inductively coupled plasmas
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Control of the spatial distribution of ion flux in dual inductively coupled plasmas

Cho, Sung-Won ; Moon, Jun-Hyeon ; Zhang, Aixian ; Chung, Chin-Wook

Journal of applied physics, 2021-03, Vol.129 (10), p.103305 [Periódico revisado por pares]

Melville: American Institute of Physics

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7
Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge
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Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge

Lee, Hyo-Chang ; Chung, Chin-Wook

Applied physics letters, 2012-12, Vol.101 (24), p.244104 [Periódico revisado por pares]

United States: AIP Publishing

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8
Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas
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Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Lee, Hyo-Chang ; Chung, Chin-Wook ; Kim, J. H. ; Seong, D. J.

Applied physics letters, 2019-08, Vol.115 (6), p.064102 [Periódico revisado por pares]

Melville: American Institute of Physics

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9
Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load
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Nonlinear circuit analysis of intermodulation currents in a floating Langmuir probe with a capacitive load

Kim, Kyung-Hyun ; Lee, Moo-Young ; Chung, Chin-Wook

Physics of plasmas, 2020-03, Vol.27 (3), p.033508 [Periódico revisado por pares]

Melville: American Institute of Physics

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10
A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure
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A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure

Park, Ji-Hwan ; Chung, Chin-Wook

Review of scientific instruments, 2018-11, Vol.89 (11), p.115006-115006 [Periódico revisado por pares]

United States: American Institute of Physics

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