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Nanopatterning of atomic layer deposited Al:ZnO films using electron beam lithography for waveguide applications in the NIR regionSantiago, Kevin ; Mundle, Rajeh ; Samantaray, Chandan B. ; Bahoura, M. ; Pradhan, A. K.Optical materials express, 2012-12, Vol.2 (12), p.1743-1750 [Periódico revisado por pares]Texto completo disponível |