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X-ray photoelectron spectroscopy analysis of TiBx (1.3 ≤ x ≤ 3.0) thin films
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X-ray photoelectron spectroscopy analysis of TiBx (1.3 ≤ x ≤ 3.0) thin films

Hellgren, Niklas ; Greczynski, Grzegorz ; Sortica, Mauricio A. ; Petrov, Ivan ; Hultman, Lars ; Rosen, Johanna

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2021-03, Vol.39 (2) [Periódico revisado por pares]

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Jahn–Teller-driven phase segregation in MnxCo3−xO4 spinel thin films
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Jahn–Teller-driven phase segregation in MnxCo3−xO4 spinel thin films

Blanchet, Miles D. ; Matthews, Bethany E. ; Spurgeon, Steven R. ; Heald, Steve M. ; Isaacs-Smith, Tamara ; Comes, Ryan B.

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-09, Vol.41 (5) [Periódico revisado por pares]

United States: American Vacuum Society / AIP

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3
HfxZr1 − xO2 thin films for semiconductor applications: An Hf- and Zr-ALD precursor comparison
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HfxZr1 − xO2 thin films for semiconductor applications: An Hf- and Zr-ALD precursor comparison

Materano, Monica ; Richter, Claudia ; Mikolajick, Thomas ; Schroeder, Uwe

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-03, Vol.38 (2) [Periódico revisado por pares]

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4
Electrical properties of p-type Zn:Ga2O3 thin films
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Electrical properties of p-type Zn:Ga2O3 thin films

Chikoidze, Ekaterine ; Sartel, Corinne ; Yamano, Hayate ; Chi, Zeyu ; Bouchez, Guillaume ; Jomard, François ; Sallet, Vincent ; Guillot, Gérard ; Boukheddaden, Kamel ; Pérez-Tomás, Amador ; Tchelidze, Tamar ; Dumont, Yves

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-07, Vol.40 (4) [Periódico revisado por pares]

AVS through the American Institute of Physics

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5
Magnetic phase diagram mapping in Fe1−xRhx composition-spread thin films
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Magnetic phase diagram mapping in Fe1−xRhx composition-spread thin films

Yu, Heshan ; Gao, Tieren ; N’Diaye, A. T. ; Arenholz, E. ; Sarker, Suchismita ; Mehta, Apurva ; Zhang, Xiaohang ; Takeuchi, Ichiro

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2) [Periódico revisado por pares]

United States: American Vacuum Society / AIP

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6
Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1−xTaxBy thin films
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Strategy for simultaneously increasing both hardness and toughness in ZrB2-rich Zr1−xTaxBy thin films

Bakhit, Babak ; Engberg, David L. J. ; Lu, Jun ; Rosen, Johanna ; Högberg, Hans ; Hultman, Lars ; Petrov, Ivan ; Greene, J. E. ; Greczynski, Grzegorz

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-05, Vol.37 (3) [Periódico revisado por pares]

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7
Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films
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Oxygen plasma treatment of TeO2—B2O3 (boro-tellurite) thin films

Demirkol, Uğur ; Durmuş, Çağrı ; Akan, Tamer

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-12, Vol.41 (6) [Periódico revisado por pares]

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8
Mechanical and tribological properties of (AlCoCrNiSi)100−xNx thin films
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Mechanical and tribological properties of (AlCoCrNiSi)100−xNx thin films

Liang, Tongyue ; Alidokht, Sima A. ; Chromik, Richard R.

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2024-01, Vol.42 (1) [Periódico revisado por pares]

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9
Formation of large-area MoS2 thin films by oxygen-catalyzed sulfurization of Mo thin films
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Formation of large-area MoS2 thin films by oxygen-catalyzed sulfurization of Mo thin films

Jo, Seong Soon ; Li, Yifei ; Singh, Akshay ; Kumar, Abinash ; Frisone, Sam ; LeBeau, James M. ; Jaramillo, Rafael

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-01, Vol.38 (1) [Periódico revisado por pares]

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10
Structural evolution and thermoelectric properties of Mg3SbxBi2−x thin films deposited by magnetron sputtering
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Structural evolution and thermoelectric properties of Mg3SbxBi2−x thin films deposited by magnetron sputtering

Sadowski, Grzegorz ; Shu, Rui ; le Febvrier, Arnaud ; Han, Zhijia ; Music, Denis ; Liu, Weishu ; Eklund, Per

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-07, Vol.41 (4) [Periódico revisado por pares]

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