TCAD Strain Calibration Versus Nanobeam Diffraction of Source/Drain Stressors for Ge MOSFETs
Rudolf Theoderich Bühler Benjamin Vincent; Liesbeth J Witters; Paola Favia; Geert Eneman; João Antonio Martino 1959-
IEEE Transactions on Electron Devices v. 62, n. 4, p. 1079-1084, April 2015
2015
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