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Refinado por: Base de dados/Biblioteca: EZB Electronic Journals Library remover assunto: Silicon remover
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1
Growth and Selective Etch of Phosphorus-Doped Silicon/Silicon–Germanium Multilayers Structures for Vertical Transistors Application
Growth and Selective Etch of Phosphorus-Doped Silicon/Silicon–Germanium Multilayers Structures for Vertical Transistors Application
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Growth and Selective Etch of Phosphorus-Doped Silicon/Silicon–Germanium Multilayers Structures for Vertical Transistors Application

Li, Chen ; Lin, Hongxiao ; Li, Junjie ; Yin, Xiaogen ; Zhang, Yongkui ; Kong, Zhenzhen ; Wang, Guilei ; Zhu, Huilong ; Radamson, Henry H.

Nanoscale research letters, 2020-12, Vol.15 (1), p.225-225, Article 225 [Periódico revisado por pares]

New York: Springer US

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2
Chemical vapor deposition of layered two-dimensional MoSi2N4 materials
Chemical vapor deposition of layered two-dimensional MoSi2N4 materials
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Chemical vapor deposition of layered two-dimensional MoSi2N4 materials

Hong, Yi-Lun ; Liu, Zhibo ; Wang, Lei ; Zhou, Tianya ; Ma, Wei ; Xu, Chuan ; Feng, Shun ; Chen, Long ; Chen, Mao-Lin ; Sun, Dong-Ming ; Chen, Xing-Qiu ; Cheng, Hui-Ming ; Ren, Wencai

Science (American Association for the Advancement of Science), 2020-08, Vol.369 (6504), p.670-674 [Periódico revisado por pares]

Washington: The American Association for the Advancement of Science

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3
Selective etching of silicon nitride over silicon oxide using ClF3/H2 remote plasma
Selective etching of silicon nitride over silicon oxide using ClF3/H2 remote plasma
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Selective etching of silicon nitride over silicon oxide using ClF3/H2 remote plasma

Lee, Won Oh ; Kim, Ki Hyun ; Kim, Doo San ; Ji, You Jin ; Kang, Ji Eun ; Tak, Hyun Woo ; Park, Jin Woo ; Song, Han Dock ; Kim, Ki Seok ; Cho, Byeong Ok ; Kim, Young Lae ; Yeom, Geun Young

Scientific reports, 2022-04, Vol.12 (1), p.5703-5703, Article 5703 [Periódico revisado por pares]

London: Nature Publishing Group

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4
Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications
Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications
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Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications

M Nuzaihan, M N ; Hashim, U ; Md Arshad, M K ; Rahim Ruslinda, A ; Rahman, S F A ; Fathil, M F M ; Ismail, Mohd H Mishra, Yogendra Kumar

PloS one, 2016-03, Vol.11 (3), p.e0152318-e0152318 [Periódico revisado por pares]

United States: Public Library of Science

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5
Fabrication of Black Silicon via Metal-Assisted Chemical Etching—A Review
Fabrication of Black Silicon via Metal-Assisted Chemical Etching—A Review
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Fabrication of Black Silicon via Metal-Assisted Chemical Etching—A Review

Arafat, Mohammad Yasir ; Islam, Mohammad Aminul ; Mahmood, Ahmad Wafi Bin ; Abdullah, Fairuz ; Nur-E-Alam, Mohammad ; Kiong, Tiong Sieh ; Amin, Nowshad

Sustainability, 2021-10, Vol.13 (19), p.10766 [Periódico revisado por pares]

Basel: MDPI AG

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6
Single-mask fabrication of micro-probe electrode array with various tip heights and sharpness using isotropic and anisotropic etching
Single-mask fabrication of micro-probe electrode array with various tip heights and sharpness using isotropic and anisotropic etching
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Single-mask fabrication of micro-probe electrode array with various tip heights and sharpness using isotropic and anisotropic etching

Shin, Young-min ; Kim, Yong-Kweon ; Lee, Seung-Ki ; Park, Jae-Hyoung

Micro & nano letters, 2018-09, Vol.13 (9), p.1245-1247 [Periódico revisado por pares]

Stevenage: The Institution of Engineering and Technology

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7
Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance
Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance
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Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance

Song, Jizhe ; Feng, Sujuan ; Shi, Haonan ; Han, Daotong ; Liu, Guangqiang

RSC advances, 2023-11, Vol.13 (48), p.33625-33633 [Periódico revisado por pares]

Cambridge: Royal Society of Chemistry

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8
Cone Angle Modulation of Silicon Nanocones through Double Etching Processes in Metal-Assisted Chemical Etching
Cone Angle Modulation of Silicon Nanocones through Double Etching Processes in Metal-Assisted Chemical Etching
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Cone Angle Modulation of Silicon Nanocones through Double Etching Processes in Metal-Assisted Chemical Etching

Chen, Hui ; Bian, Chenyu ; Zhang, Cheng ; Wang, Shaojun ; Zhang, Bingchang

Journal of physics. Conference series, 2023-03, Vol.2463 (1), p.12004 [Periódico revisado por pares]

Bristol: IOP Publishing

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9
Large area fabrication of high aspect ratio nano-cylinders on micro-pillars based on a colloidal crystal mask
Large area fabrication of high aspect ratio nano-cylinders on micro-pillars based on a colloidal crystal mask
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Large area fabrication of high aspect ratio nano-cylinders on micro-pillars based on a colloidal crystal mask

Yan, Zexiang ; Wang, Ying ; Zeng, Xingchang ; Lu, Jiangbo ; Lv, Xianglian ; Yuan, Weizheng ; He, Yang

Micro & nano letters, 2020-12, Vol.15 (15), p.1115-1119 [Periódico revisado por pares]

Stevenage: The Institution of Engineering and Technology

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10
Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures
Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures
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Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures

Akan, Rabia ; Parfeniukas, Karolis ; Vogt, Carmen ; Toprak, Muhammet S ; Vogt, Ulrich

RSC advances, 2018-01, Vol.8 (23), p.12628-12634 [Periódico revisado por pares]

England: Royal Society of Chemistry

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