Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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Deposition of microcrystalline silicon in electron-cyclotron resonance discharge (24GHz) plasma from silicon tetrafluoride precursorMansfeld, D.А. ; Vodopyanov, А.V. ; Golubev, S.V. ; Sennikov, P.G. ; Mochalov, L.A. ; Andreev, B.А. ; Drozdov, Yu N. ; Drozdov, М.N. ; Shashkin, V.I. ; Bulkin, P. ; Roca i Cabarrocas, P.Thin solid films, 2014-07, Vol.562, p.114-117 [Periódico revisado por pares]Amsterdam: Elsevier B.VTexto completo disponível |
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2 |
Material Type: Artigo
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Experimental investigations of silicon tetrafluoride decomposition in ECR discharge plasmaVodopyanov, A. V. ; Golubev, S. V. ; Mansfeld, D. A. ; Sennikov, P. G. ; Drozdov, Yu. N.Review of scientific instruments, 2011-06, Vol.82 (6), p.063503-063503-7 [Periódico revisado por pares]United States: American Institute of PhysicsTexto completo disponível |
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3 |
Material Type: Artigo
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Equilibrium Chemistry in BCl 3 – H 2 –Ar PlasmaGornushkin, I B ; Shabanov, S V ; Sennikov, P GPlasma chemistry and plasma processing, 2019-07, Vol.39 (4), p.1087-1102 [Periódico revisado por pares]New York: Springer Nature B.VTexto completo disponível |
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4 |
Material Type: Artigo
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Equilibrium calculations for plasmas of volatile halides of III, IV and VI group elements mixed with H2 and H2 + CX4 (X = H, Cl, F) relevant to PECVD of isotopic materialsGornushkin, I. B. ; Sennikov, P. G. ; Kornev, R. A. ; Polyakov, V. S.Journal of radioanalytical and nuclear chemistry, 2020-10, Vol.326 (1), p.407-421 [Periódico revisado por pares]Cham: Springer International PublishingTexto completo disponível |
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5 |
Material Type: Artigo
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Technical Note: VUV photodesorption rates from water ice in the 120–150 K temperature range – significance for Noctilucent CloudsKulikov, M. Yu ; Feigin, A. M. ; Ignatov, S. K. ; Sennikov, P. G. ; Bluszcz, Th ; Schrems, O.Atmospheric chemistry and physics, 2011-02, Vol.11 (4), p.1729-1734 [Periódico revisado por pares]Katlenburg-Lindau: Copernicus GmbHTexto completo disponível |
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6 |
Material Type: Artigo
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Thermal conductivity of isotopically enriched siliconRuf, T. ; Henn, R.W. ; Asen-Palmer, M. ; Gmelin, E. ; Cardona, M. ; Pohl, H.-J. ; Devyatych, G.G. ; Sennikov, P.G.Solid state communications, 2000-01, Vol.115 (5), p.243-247 [Periódico revisado por pares]Elsevier LtdTexto completo disponível |
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7 |
Material Type: Artigo
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Preparation of Boron Carbide from BF3 and BCl3 in Hydrogen Plasma of Arc RF DischargeSennikov, P. G. ; Kornev, R. A. ; Shishkin, A. I.Plasma chemistry and plasma processing, 2017-07, Vol.37 (4), p.997-1008 [Periódico revisado por pares]New York: Springer USTexto completo disponível |
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8 |
Material Type: Artigo
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Laser induced dielectric breakdown in reactive mixture SiF4 + H2Sennikov, P.G. ; Ermakov, A.A. ; Kornev, R.A. ; Gornushkin, I.B.Spectrochimica acta. Part B: Atomic spectroscopy, 2021-05, Vol.179, p.106099, Article 106099 [Periódico revisado por pares]Oxford: Elsevier B.VTexto completo disponível |
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9 |
Material Type: Artigo
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Hydrogen Reduction of MoF6 and Molybdenum Carbide Formation in RF Inductively Coupled Low-Pressure Discharge: Experiment and Equilibrium Thermodynamics ConsiderationSennikov, P. G. ; Gornushkin, I. B. ; Kornev, R. A. ; Nazarov, V. V. ; Polyakov, V. S. ; Shkrunin, V. E.Plasma chemistry and plasma processing, 2021-03, Vol.41 (2), p.673-690 [Periódico revisado por pares]New York: Springer USTexto completo disponível |
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10 |
Material Type: Artigo
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Laser Induced Dielectric Breakdown for Chemical Vapor Deposition by Hydrogen Reduction of Volatile Boron Halides BCl3 and BF3Gornushkin, I. B. ; Sennikov, P. G. ; Kornev, R. A. ; Ermakov, A. A. ; Shkrunin, V. E.Plasma chemistry and plasma processing, 2020-09, Vol.40 (5), p.1145-1162 [Periódico revisado por pares]New York: Springer USTexto completo disponível |