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1
Investigations of effects of bias polarization and chemical parameters on morphology and filling capability of 130 nm damascene electroplated copper
Investigations of effects of bias polarization and chemical parameters on morphology and filling capability of 130 nm damascene electroplated copper
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Investigations of effects of bias polarization and chemical parameters on morphology and filling capability of 130 nm damascene electroplated copper

Chang, S-C ; Shieh, J-M ; Lin, K-C ; Dai, B-T ; Wang, T-C ; Chen, C-F ; Feng, M-S ; Li, Y-H ; Lu, C-P

2001

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2
Enhancement of implantation efficiency by grid biasing in radio-frequency inductively coupled plasma direct-current plasma immersion ion implantation
Enhancement of implantation efficiency by grid biasing in radio-frequency inductively coupled plasma direct-current plasma immersion ion implantation
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Enhancement of implantation efficiency by grid biasing in radio-frequency inductively coupled plasma direct-current plasma immersion ion implantation

Tong, Honghui ; Fu, Ricky KY ; Zeng, Xuchu ; Kwok, Dixon TK ; Chu, Paul K

2002

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3
Use of optical density-based measurements as metrics for smoke detectors
Use of optical density-based measurements as metrics for smoke detectors
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Use of optical density-based measurements as metrics for smoke detectors

Milke, James A ; Torero, Jose L ; Mowrer, Frederick W ; Fuhrmeister, Clyde

2002

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4
Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process
Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process
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Effect of catalyst on growth behavior of carbon nanotube synthesizing by microwave heating thermal chemical vapor deposition process

Chen, S-C ; Shih, L-Y ; Chang, Y-C ; Tu, G-C ; Lin, I-N

2001

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5
Verification and characterization of a mathematical model of particle size distribution
Verification and characterization of a mathematical model of particle size distribution
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Verification and characterization of a mathematical model of particle size distribution

Chen, Y ; Zhang, Y ; Barber, E M ; Bundy, D S

1998

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6
Modern vane anemometers and their use for fume hood monitoring
Modern vane anemometers and their use for fume hood monitoring
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Modern vane anemometers and their use for fume hood monitoring

Downing, Peter M

1997

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7
Electronic states at the interface of Ti-Si oxide on Si(100)
Electronic states at the interface of Ti-Si oxide on Si(100)
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Electronic states at the interface of Ti-Si oxide on Si(100)

Fulton, C C ; Lucovsky, G ; Nemanich, R J

2002

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8
Deep etch of GaP using high-density plasma for light-emitting diode applications
Deep etch of GaP using high-density plasma for light-emitting diode applications
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Deep etch of GaP using high-density plasma for light-emitting diode applications

Wuu, D S ; Chung, C R ; Liu, Y H ; Horng, R H ; Huang, SH

2002

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9
Electron field emission from hydrogen-free amorphous carbon-coated ZnO tip array
Electron field emission from hydrogen-free amorphous carbon-coated ZnO tip array
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Electron field emission from hydrogen-free amorphous carbon-coated ZnO tip array

Mao, D S ; Wang, X ; Li, W ; Liu, X H ; Li, Q ; Xu, J F

2002

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10
Electrical characteristics of ultrathin ZrO sub(2) prepared by wet oxidation of an ultrathin Zr-metal layer
Electrical characteristics of ultrathin ZrO sub(2) prepared by wet oxidation of an ultrathin Zr-metal layer
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Electrical characteristics of ultrathin ZrO sub(2) prepared by wet oxidation of an ultrathin Zr-metal layer

Jeon, Sanghun ; Hwang, Hyunsang

2002

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