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Improving focus performance at litho using diffraction-based focus metrology, novel calibration methods, interface, and control loop
Material Type:
Ata de Congresso
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Improving focus performance at litho using diffraction-based focus metrology, novel calibration methods, interface, and control loop

Hu, Jiarui ; Chen, Y. L ; Chen, K. H ; Lee, Brian ; Tsai, Frankie ; Ke, C. M ; Liao, C. H ; Ngo, Desmond ; Gosali, Benny ; Tijssen, Robin ; Huang, Vincent ; Tu, Ward ; Noot, Marc ; Escalante Marun, Maryana ; Leewis, Christian ; Luijten, Carlo ; Staals, Frank ; Van Veen, Martijn ; Furthner, Francois ; Young, Stuart ; Bhattacharyya, Kaustuve Ukraintsev, Vladimir A ; Sanchez, Martha I

SPIE 2016

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2
Woodland history in the upper Harz Mountains revealed by kiln site, soil sediment and peat charcoal analyses
Material Type:
Artigo
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Woodland history in the upper Harz Mountains revealed by kiln site, soil sediment and peat charcoal analyses

Knapp, Hannes ; Robin, Vincent ; Kirleis, Wiebke ; Nelle, Oliver

Quaternary international, 2013-03, Vol.289, p.88-100 [Periódico revisado por pares]

Elsevier Ltd

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3
Multi-Proxy Characterisation of the Storegga Tsunami and Its Impact on the Early Holocene Landscapes of the Southern North Sea
Material Type:
Artigo
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Multi-Proxy Characterisation of the Storegga Tsunami and Its Impact on the Early Holocene Landscapes of the Southern North Sea

Gaffney, Vincent ; Fitch, Simon ; Bates, Martin ; Ware, Roselyn L. ; Kinnaird, Tim ; Gearey, Benjamin ; Hill, Tom ; Telford, Richard ; Batt, Cathy ; Stern, Ben ; Whittaker, John ; Davies, Sarah ; Sharada, Mohammed Ben ; Everett, Rosie ; Cribdon, Rebecca ; Kistler, Logan ; Harris, Sam ; Kearney, Kevin ; Walker, James ; Muru, Merle ; Hamilton, Derek ; Law, Matthew ; Finlay, Alex ; Bates, Richard ; Allaby, Robin G.

Geosciences (Basel), 2020-07, Vol.10 (7), p.270 [Periódico revisado por pares]

Basel: MDPI AG

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