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Material Type: Article
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Epitaxial growth of ZrN on Si(100)BARNETT, S. A ; HULTMAN, L ; SUNDGREN, J.-E ; RONIN, F ; ROHDE, SAppl. Phys. Lett.; (United States), 1988-08, Vol.53 (5), p.400-402 [Peer Reviewed Journal]Melville, NY: American Institute of PhysicsFull text available |