Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoringŠamara, V ; Booth, J-P ; Marneffe, J-F de ; Milenin, A P ; Brouri, M ; Boullart, WPlasma sources science & technology, 2012-12, Vol.21 (6), p.65004-1-8 [Periódico revisado por pares]Bristol: IOP PublishingTexto completo disponível |
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2 |
Material Type: Ata de Congresso
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Strained germanium quantum well p-FinFETs fabricated on 45nm Fin pitch using replacement channel, replacement metal gate and germanide-free local interconnectWitters, L ; Mitard, J ; Loo, R ; Demuynck, S ; Chew, SA ; Schram, T ; Tao, Z ; Hikavyy, A ; Sun, J W ; Milenin, A P ; Mertens, H ; Vrancken, C ; Favia, P ; Schaekers, M ; Bender, H ; Horiguchi, N ; Langer, R ; Barla, K ; Mocuta, D ; Collaert, N ; Thean, AV-YIEEE Conferences, 2015, p.T56-T57Sem texto completo |
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3 |
Material Type: Artigo
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Strained Germanium Gate-All-Around pMOS Device Demonstration Using Selective Wire Release Etch Prior to Replacement Metal Gate DepositionWitters, L. ; Arimura, H. ; Sebaai, F. ; Hikavyy, A. ; Milenin, A. P. ; Loo, R. ; De Keersgieter, A. ; Eneman, G. ; Schram, T. ; Wostyn, K. ; Devriendt, K. ; Schulze, A. ; Lieten, R. ; Bilodeau, S. ; Cooper, E. ; Storck, P. ; Chiu, E. ; Vrancken, C. ; Favia, P. ; Vancoille, E. ; Mitard, J. ; Langer, R. ; Opdebeeck, A. ; Holsteyns, F. ; Waldron, N. ; Barla, K. ; De Heyn, V. ; Mocuta, D. ; Collaert, N.IEEE transactions on electron devices, 2017-11, Vol.64 (11), p.4587-4593 [Periódico revisado por pares]IEEETexto completo disponível |
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4 |
Material Type: Ata de Congresso
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Study on metrology of ERU tuning in TCP reactor, using PVx2 sensor waferMilenin, A P ; de Marneffe, J F ; Struyf, H ; Boullart, W ; Arleo, P2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2010, p.34-38 [Periódico revisado por pares]IEEETexto completo disponível |
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5 |
Material Type: Artigo
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Temperature and RF Current Sensor Wafers for Plasma EtchingMilenin, A. P. ; Demand, M. ; Boullart, W. ; Arleo, P.Journal of the Electrochemical Society, 2012-01, Vol.159 (1), p.H5-H10 [Periódico revisado por pares]Texto completo disponível |
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6 |
Material Type: Artigo
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(Invited) Challenges on Surface Conditioning in 3D Device Architectures: Triple-Gate FinFETs, Gate-All-Around Lateral and Vertical Nanowire FETsVeloso, Anabela ; Paraschiv, Vasile ; Vecchio, Emma ; Devriendt, Katia ; Li, Waikin ; Simoen, Eddy ; Chan, B. T. ; Tao, Zheng ; Rosseel, Erik ; Loo, Roger ; Milenin, Alexey P. ; Kunert, Bernardette ; Teugels, Lieve ; Sebaai, Farid ; Lorant, Christophe ; van Dorp, Dennis ; Altamirano-Sánchez, Efraín ; Brus, Stephan ; Marien, Philippe ; Fleischmann, Claudia ; Melkonyan, Davit ; Huynh-Bao, Trong ; Eneman, Geert ; Hellings, Geert ; Sibaja-Hernandez, Arturo ; Matagne, Philippe ; Waldron, Niamh ; Mocuta, Dan ; Collaert, NadineECS transactions, 2017-08, Vol.80 (2), p.3-20The Electrochemical Society, IncTexto completo disponível |
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7 |
Material Type: Artigo
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Visible range whispering-gallery mode in microdisk array based on size-controlled Si nanocrystalsZhang, Rong-Jun ; Seo, Se-Young ; Milenin, Alexey P. ; Zacharias, Margit ; Gösele, UlrichApplied physics letters, 2006-04, Vol.88 (15) [Periódico revisado por pares]Texto completo disponível |