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Refinado por: assunto: Exact Sciences And Technology remover Nome da Publicação: Surface And Coatings Technology remover
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Spatial distributions of ion-species in a large-volume inductively coupled plasma source
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Spatial distributions of ion-species in a large-volume inductively coupled plasma source

Okuji, S ; Sakudo, N ; Hayashi, K ; Okada, M ; Onogawa, T ; Maesaka, T ; Nishiyama, Y ; Komatsu, K ; Toyoda, K ; Yashima, S ; Ishida, T ; Awazu, K

Surface & coatings technology, 2001-02, Vol.136 (1), p.102-105 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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Effect of electron temperature on the DLC film properties
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Effect of electron temperature on the DLC film properties

Ikenaga, Noriaki ; Awazu, Kaoru ; Sakudo, Noriyuki ; Yasui, Haruyuki ; Kawabata, Takeshi

Surface & coatings technology, 2005-06, Vol.196 (1), p.226-230 [Periódico revisado por pares]

Lausanne: Elsevier B.V

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Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels
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Effects of ion beam bombardment of carbon thin films deposited onto tungsten carbide and tool steels

Awazu, Kaoru ; Yoshida, Hiroyuki ; Watanabe, Hiroshi ; Iwaki, Masaya ; Guzman, Luis

Surface & coatings technology, 1992-04, Vol.51 (1), p.509-513 [Periódico revisado por pares]

LAUSANNE: Elsevier B.V

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