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Improvement of efficient coupling and optical resonances by using taper-waveguides coupled to cascade of UV210 polymer micro-resonators
Improvement of efficient coupling and optical resonances by using taper-waveguides coupled to cascade of UV210 polymer micro-resonators
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Improvement of efficient coupling and optical resonances by using taper-waveguides coupled to cascade of UV210 polymer micro-resonators

Castro-Beltran, R ; Huby, N ; Loas, G ; Lhermite, H ; Pluchon, D ; Bêche, B

Journal of micromechanics and microengineering, 2014-12, Vol.24 (12), p.125006 [Periódico revisado por pares]

Bristol: IOP Publishing

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2
3D probe array integrated with a front-end 100-channel neural recording ASIC
3D probe array integrated with a front-end 100-channel neural recording ASIC
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3D probe array integrated with a front-end 100-channel neural recording ASIC

Cheng, Ming-Yuan ; Yao, Lei ; Tan, Kwan Ling ; Lim, Ruiqi ; Li, Peng ; Chen, Weiguo

Journal of micromechanics and microengineering, 2014-12, Vol.24 (12), p.125010 [Periódico revisado por pares]

Bristol: IOP Publishing

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3
Design, Modeling, Fabrication, and Evaluation of Thermoelectric Generators with Hot-Wire Chemical Vapor Deposited Polysilicon as Thermoelement Material
Design, Modeling, Fabrication, and Evaluation of Thermoelectric Generators with Hot-Wire Chemical Vapor Deposited Polysilicon as Thermoelement Material
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Design, Modeling, Fabrication, and Evaluation of Thermoelectric Generators with Hot-Wire Chemical Vapor Deposited Polysilicon as Thermoelement Material

de Leon, Maria Theresa ; Tarazona, Antulio ; Chong, Harold ; Kraft, Michael

Journal of electronic materials, 2014-11, Vol.43 (11), p.4070-4081 [Periódico revisado por pares]

Boston: Springer US

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4
Hot embossing of transparent high aspect ratio micro parts
Hot embossing of transparent high aspect ratio micro parts
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Hot embossing of transparent high aspect ratio micro parts

Kolew, A. ; Heilig, M. ; Schneider, M. ; Münch, D. ; Ezzat, R. ; Schneider, N. ; Worgull, M.

Microsystem technologies, 2014-10, Vol.20 (10-11), p.1967-1973 [Periódico revisado por pares]

Berlin/Heidelberg: Springer Berlin Heidelberg

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5
Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds
Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds
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Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

Geerlings, J ; Sarajlic, E ; Berenschot, J W ; Siekman, M H ; Jansen, H V ; Abelmann, L ; Tas, N R

Journal of micromechanics and microengineering, 2014-10, Vol.24 (10), p.105013-16 [Periódico revisado por pares]

Bristol: IOP Publishing

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6
Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers
Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers
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Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

Chang, Chienliu ; Moini, Azadeh ; Nikoozadeh, Amin ; Sarioglu, Ali Fatih ; Apte, Nikhil ; Zhuang, Xuefeng ; Khuri-Yakub, Butrus T

Journal of micromechanics and microengineering, 2014-10, Vol.24 (10), p.107002-9 [Periódico revisado por pares]

Bristol: IOP Publishing

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7
Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences
Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences
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Nanoimprint lithography and micro-embossing in LiGA technology: similarities and differences

Schift, Helmut

Microsystem technologies, 2014-10, Vol.20 (10-11), p.1773-1781 [Periódico revisado por pares]

Berlin/Heidelberg: Springer Berlin Heidelberg

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8
Fabrication and characterization of polymer microprisms
Fabrication and characterization of polymer microprisms
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Fabrication and characterization of polymer microprisms

Forfang, William Brian Derek ; Conner, Timothy Glenn ; You, Byoung Hee ; Park, Taehyun ; Song, In-Hyouk

Microsystem technologies, 2014-10, Vol.20 (10-11), p.2071-2077 [Periódico revisado por pares]

Berlin/Heidelberg: Springer Berlin Heidelberg

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9
Piezoelectric peristaltic micropump with a single actuator
Piezoelectric peristaltic micropump with a single actuator
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Piezoelectric peristaltic micropump with a single actuator

Pe ar, Borut ; Kri aj, Dejan ; Vrta nik, Danilo ; Resnik, Drago ; Dol an, Tine ; Mo ek, Matej

Journal of micromechanics and microengineering, 2014-10, Vol.24 (10), p.105010-9 [Periódico revisado por pares]

Bristol: IOP Publishing

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10
Low-temperature anodic bonding using thin films of lithium-niobate-phosphate glass
Low-temperature anodic bonding using thin films of lithium-niobate-phosphate glass
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Low-temperature anodic bonding using thin films of lithium-niobate-phosphate glass

Woetzel, S ; Kessler, E ; Diegel, M ; Schultze, V ; Meyer, H-G

Journal of micromechanics and microengineering, 2014-09, Vol.24 (9), p.95001-6 [Periódico revisado por pares]

Bristol: IOP Publishing

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