Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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Local structure and bonds of amorphous silicon oxynitride thin filmsWanderla Luis Scopel Márcia Carvalho de Abreu Fantini; Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-Thin Solid Films Lausanne v. 413, n. 1-2, p. 59-64, 2002Lausanne 2002Acesso online |
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2 |
Material Type: Artigo
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Local structure and bonds of amorphous silicon oxynitride thin filmsWanderla Luis Scopel Márcia Carvalho de Abreu Fantini; Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-Thin Solid Films Lausanne v. 413, n. 1-2, p. 59-64, 2002Lausanne 2002Acesso online |
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3 |
Material Type: Artigo
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Mechanical and thermophysical properties of PECVD oxynitride films measured by memsMarcelo Silva Guimarães Amilton Sinatora 1951-; M. I Aloyo; Inés Pereyra 1947-; Marcelo Nelson Páez Carreño 1962-Thin Solid Films Lausanne v. 398-399, p. 626-631, nov. 2001Lausanne 2001Acesso online |
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4 |
Material Type: Artigo
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On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy filmsMarco Isaías Alayo Chávez 1971- Inés Pereyra 1947-; Wanderla Luis Scopel; Márcia Carvalho de Abreu FantiniThin Solid Films Lausanne v. 402, n. 1-2, p. 154-161, 2002Lausanne 2002Acesso online |
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5 |
Material Type: Artigo
|
Mechanical and thermophysical properties of PECVD oxynitride films measured by memsMarcelo Silva Guimarães Amilton Sinatora 1951-; M. I Aloyo; Inés Pereyra 1947-; Marcelo Nelson Páez Carreño 1962-Thin Solid Films Lausanne v. 398-399, p. 626-631, nov. 2001Lausanne 2001Acesso online |
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6 |
Material Type: Artigo
|
On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy filmsMarco Isaías Alayo Chávez 1971- Inés Pereyra 1947-; Wanderla Luis Scopel; Márcia Carvalho de Abreu FantiniThin Solid Films Lausanne v. 402, n. 1-2, p. 154-161, 2002Lausanne 2002Acesso online |