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Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets
Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets
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Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets

Satake, Takahiko ; Kawasaki, Hiroharu ; Aoqiu, Shin-Ichi

Archives of Electrical Engineering (Online), 2023-01, Vol.72 (2), p.555-563 [Periódico revisado por pares]

Warsaw: Polish Academy of Sciences

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