Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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The role of physisorption in the cryogenic etching process of siliconAntoun, G. ; Dussart, R. ; Tillocher, T. ; Lefaucheux, P. ; Cardinaud, C. ; Girard, A. ; Tahara, S. ; Yamazaki, K. ; Yatsuda, K. ; Faguet, J. ; Maekawa, K.Japanese Journal of Applied Physics, 2019-06, Vol.58 (SE), p.SEEB03 [Periódico revisado por pares]Tokyo: IOP PublishingTexto completo disponível |
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2 |
Material Type: Artigo
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Cryogenic etching processes applied to porous low-k materials using SF6/C4F8 plasmasLeroy, F ; Zhang, L ; Tillocher, T ; Yatsuda, K ; Maekawa, K ; Nishimura, E ; Lefaucheux, P ; de Marneffe, J-F ; Baklanov, M R ; Dussart, RJournal of physics. D, Applied physics, 2015-11, Vol.48 (43) [Periódico revisado por pares]IOP PublishingTexto completo disponível |
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3 |
Material Type: Artigo
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Effect of viscoelastic film for shear horizontal surface acoustic wave on quartzGoto, Mikihiro ; Yatsuda, Hiromi ; Kondoh, JunJapanese Journal of Applied Physics, 2015-07, Vol.54 (7S1), p.7 [Periódico revisado por pares]The Japan Society of Applied PhysicsTexto completo disponível |
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4 |
Material Type: Artigo
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Temperature dependence of immunoreactions using shear horizontal surface acoustic wave immunosensorsKogai, Takashi ; Yatsuda, Hiromi ; Kondoh, JunJapanese Journal of Applied Physics, 2017-07, Vol.56 (7S1), p.7 [Periódico revisado por pares]The Japan Society of Applied PhysicsTexto completo disponível |
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5 |
Material Type: Artigo
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Analysis of Mass Loading Effect on Guided Shear Horizontal Surface Acoustic Wave on Liquid/Au/Quartz Structure for Biosensor ApplicationGoto, Mikihiro ; Yatsuda, Hiromi ; Kondoh, JunJapanese Journal of Applied Physics, 2013-07, Vol.52 (7), p.07HD10-07HD10-4 [Periódico revisado por pares]The Japan Society of Applied PhysicsTexto completo disponível |
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6 |
Material Type: Artigo
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Liquid-Phase Shear Horizontal Surface Acoustic Wave ImmunosensorKogai, Takashi ; Yoshimura, Naoyuki ; Mori, Toshimasa ; Yatsuda, HiromiJapanese Journal of Applied Physics, 2010-07, Vol.49 (7), p.07HD15-07HD15-4 [Periódico revisado por pares]The Japan Society of Applied PhysicsTexto completo disponível |
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7 |
Material Type: Artigo
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Measurement Characteristics of Flow-Type Shear-Horizontal Surface Acoustic Wave Sensor for Direct Methanol Fuel CellsKano, Koji ; Kogai, Takashi ; Yoshimura, Naoyuki ; Yatsuda, Hiromi ; Kondoh, Jun ; Shiokawa, ShowkoJapanese Journal of Applied Physics, 2012-07, Vol.51 (7), p.07GC20-07GC20-5 [Periódico revisado por pares]The Japan Society of Applied PhysicsTexto completo disponível |
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8 |
Material Type: Artigo
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Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensationZhang, Liping ; de Marneffe, Jean-François ; Leroy, Floriane ; Lefaucheux, Philippe ; Tillocher, Thomas ; Dussart, Remi ; Maekawa, Kaoru ; Yatsuda, Koichi ; Dussarrat, Christian ; Goodyear, Andy ; Cooke, Mike ; De Gendt, Stefan ; Baklanov, Mikhail RJournal of physics. D, Applied physics, 2016-05, Vol.49 (17), p.175203-175214 [Periódico revisado por pares]IOP PublishingTexto completo disponível |
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9 |
Material Type: Artigo
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Cryogenic etching processes applied to porous low- k materials using SF 6 /C 4 F 8 plasmasLeroy, F ; Zhang, L ; Tillocher, T ; Yatsuda, K ; Maekawa, K ; Nishimura, E ; Lefaucheux, P ; de Marneffe, J-F ; Baklanov, M R ; Dussart, RJournal of physics. D, Applied physics, 2015-11, Vol.48 (43), p.435202 [Periódico revisado por pares]Texto completo disponível |
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10 |
Material Type: Artigo
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Cryogenic etching processes applied to porous low-k materials using SF sub(6)/C sub(4)F sub(8) plasmasLeroy, F ; Zhang, L ; Tillocher, T ; Yatsuda, K ; Maekawa, K ; Nishimura, E ; Lefaucheux, P ; de Marneffe, J-F ; Baklanov, M R ; Dussart, RJournal of physics. D, Applied physics, 2015-11, Vol.48 (43), p.435202-435206 [Periódico revisado por pares]Texto completo disponível |