Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
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1 |
Material Type: Artigo
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Structural investigation of Si-rich amorphous silicon oxynitride filmsWanderla Luis Scopel Márcia Carvalho de Abreu Fantini; Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-Thin Solids Films Lausanne v. 425, n. 1-2, p. 275-281, 2003Lausanne 2003Acesso online |
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2 |
Material Type: Artigo
|
Structural investigation of Si-rich amorphous silicon oxynitride filmsWanderla Luis Scopel Márcia Carvalho de Abreu Fantini; Marco Isaías Alayo Chávez 1971-; Inés Pereyra 1947-Thin Solids Films Lausanne v. 425, n. 1-2, p. 275-281, 2003Lausanne 2003Acesso online |