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Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations

Delattre, Pierre-Alexandre ; Lafleur, Trevor ; Johnson, Erik ; Booth, Jean-Paul

Journal of physics. D, Applied physics, 2013-06, Vol.46 (23), p.235201 [Peer Reviewed Journal]

Bristol: IOP Publishing

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