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EPMAによるBN粉末とBN膜の状態分析

上月, 秀徳 ; 元山, 宗之 ; Kohzuki, Hidenori ; Motoyama, Muneyuki

日本金属学会誌, 1992, Vol.56(5), pp.565-571 [Periódico revisado por pares]

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  • Título:
    EPMAによるBN粉末とBN膜の状態分析
  • Autor: 上月, 秀徳 ; 元山, 宗之 ; Kohzuki, Hidenori ; Motoyama, Muneyuki
  • Assuntos: Boron X-Ray Spectrum ; Chemical State Analysis ; Boron Nitride ; Boron Nitride Film ; Ion Plating ; Crystal Structure ; Cubic Boron Nitride ; Wurtzite-Type Boron Nitride ; Rhombohedral Boron Nitride ; Turbostratic Boron Nitride ; Amorphous Boron Nitride ; Hexagonal Boron Nitride
  • É parte de: 日本金属学会誌, 1992, Vol.56(5), pp.565-571
  • Descrição: BK X-ray spectra were measured precisely from some boron nitride(BN) powders of different crystal structures by an electron probe microanalyzer(EPMA), in order to investigate the change in spectral features with the crystal structures. BK X-ray spectra of several BN films deposited by an ion plating method were measured by an EPMA. Their spectral features were discussed in comparison with those of BN powders.
    It was observed that the position of BK main peaks of BN powders shifted from that of metallic B to the long wavelength side, and that these spectra accompanied a satellite peak at the long wavelength side of the main peak and two satellite peaks at the short wavelength side of the main peak. It was found that the BK X-ray spectra of BN powders changed with their crystal structures in the spectral features such as the position and the asymmetric index of the main peak or the position and the relative intensity of the satellite peak. Accordingly, the crystal structure of BN powder could be identified by BK X-ray spectral feature.
    BK X-ray spectra were measured by an EPMA for the BN films having the thickness of about 200 nm and the grain size of about 10 nm. The BK X-ray spectra of the BN films, which had been identified as cubic boron nitride(cBN) by infrared absorption spectra and electron diffraction patterns, were different from that of cBN powder in the spectral features such as the position and the asymmetric index of the main peak or the position and the relative intensity of satellite peak. Therefore, it was presumed that there was some difference in the crystal structure between cBN thin film and cBN powder.

  • Idioma: unk

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