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Investigations of a high volume atmospheric plasma torch at 915MHz

Kopecki, J ; Kiesler, D ; Leins, M ; Schulz, A ; Walker, M ; Kaiser, M ; Muegge, H ; Stroth, U

Surface & Coatings Technology, 25 July 2011, Vol.205, pp.S342-S346 [Periódico revisado por pares]

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  • Título:
    Investigations of a high volume atmospheric plasma torch at 915MHz
  • Autor: Kopecki, J ; Kiesler, D ; Leins, M ; Schulz, A ; Walker, M ; Kaiser, M ; Muegge, H ; Stroth, U
  • Assuntos: Atmospheric Plasma Torch ; Microwave ; Optical Emission Spectroscopy ; Plasma Spraying ; Silicon ; Atmospheric Plasma Torch ; Microwave ; Optical Emission Spectroscopy ; Plasma Spraying ; Silicon ; Engineering ; Chemistry
  • É parte de: Surface & Coatings Technology, 25 July 2011, Vol.205, pp.S342-S346
  • Descrição: An atmospheric pressure microwave plasma torch at a frequency of 915MHz was developed and investigated. The development was accompanied by simulations of the electromagnetic field distribution in the plasma device with the programme CST Microwave Studio®. Optical emission spectroscopy (OES) was carried out in order to determine the gas temperature of the plasma. The measured temperature of an argon/hydrogen-plasma was up to 7000K which is high enough to evaporate all materials. As an application we used the plasma torch for reactive evaporation of silicon powder and subsequent deposition of silicon coatings with different morphologies which were investigated mainly by scanning electron microscopy. ► We developed an atmospheric microwave plasma torch assisted by F simulations. ► We determined the gas temperature of the plasma by optical emission spectroscopy. ► Silicon powder was reactively evaporated in an Ar/H2-Plasma. ► Thin silicon coatings were deposited...
  • Idioma: Inglês

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