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Optical phonon lifetimes in sputtered AlN thin films

Pobedinskas, P. ; Ruttens, B. ; D’haen, J. ; Haenen, K.

Applied Physics Letters, 07 May 2012, Vol.100(19) [Periódico revisado por pares]

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  • Título:
    Optical phonon lifetimes in sputtered AlN thin films
  • Autor: Pobedinskas, P. ; Ruttens, B. ; D’haen, J. ; Haenen, K.
  • Assuntos: Structural, Mechanical, Optical, And Thermodynamic Properties Of Advanced Materials
  • É parte de: Applied Physics Letters, 07 May 2012, Vol.100(19)
  • Descrição: We study the vibrational properties of AlN thin films deposited on silicon (100) substrates by the reactive DC-pulsed magnetron sputtering. The frequencies and lifetimes of the E 1 (TO) and A 1 (LO) optical phonons are calculated from Fourier transform infrared spectra using the factorized model of a damped oscillator. We analyze the structural properties by the x-ray diffraction technique to correlate the elongation of phonon lifetimes with increasing film thickness. The lifetimes of the phonon modes in AlN thin films are compared to the values in a single crystal.
  • Idioma: Inglês

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