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Evolution of electron temperature in low pressure magnetized capacitive plasma

You, S. J. ; Park, G. Y. ; Kwon, J. H. ; Kim, J. H. ; Chang, H. Y. ; Lee, J. K. ; Seong, D. J. ; Shin, Y. H.

Applied Physics Letters, 08 March 2010, Vol.96(10) [Periódico revisado por pares]

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  • Título:
    Evolution of electron temperature in low pressure magnetized capacitive plasma
  • Autor: You, S. J. ; Park, G. Y. ; Kwon, J. H. ; Kim, J. H. ; Chang, H. Y. ; Lee, J. K. ; Seong, D. J. ; Shin, Y. H.
  • Assuntos: Plasmas And Electrical Discharges
  • É parte de: Applied Physics Letters, 08 March 2010, Vol.96(10)
  • Descrição: The evolution of electron temperature in a low pressure magnetized capacitive discharge was investigated under the collisionless electron heating regime. The results showed that while the electron temperature increases monotonously with the magnetic field in previous study [ Turner et al. , Phys. Rev. Lett. 76 , 2069 ( 1996 ) ], the electron temperature in our experiment exhibited nonmonotonic evolution behavior with the magnetic field. This nonmonotonic evolution of the electron temperature with the magnetic field was shown to be a combined effect of suppressing electron resonance heating and enhancing collisional heating while increasing the magnetic field.
  • Idioma: Inglês

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