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Investigation of focused ion beam induced damage in single crystal diamond tools

Tong, Zhen ; Luo, Xichun

Applied Surface Science, August 30, 2015, Vol.347, p.727(9) [Periódico revisado por pares]

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  • Título:
    Investigation of focused ion beam induced damage in single crystal diamond tools
  • Autor: Tong, Zhen ; Luo, Xichun
  • Assuntos: Tool Industry
  • É parte de: Applied Surface Science, August 30, 2015, Vol.347, p.727(9)
  • Descrição: To link to full-text access for this article, visit this link: http://dx.doi.org/10.1016/j.apsusc.2015.04.120 Byline: Zhen Tong, Xichun Luo Abstract: * The FIB-induced damage layer should be paid enough attention when shaping the cutting edges of nanoscale diamond tools. * During FIB processing cutting tools made of natural single crystal diamond, the Ga.sup.+ collision will create a damage layer around tool tips. * The thicknesses of damaged layer and the level for amorphization of diamond significantly increase with beam energy. * The FIB-induced doping and defects during tool fabrication are responsible for the early detection of tool wear of nanoscale diamond tools. Author Affiliation: (a) Centre for Precision Manufacturing, Department of Design, Manufacture & Engineering Management, University of Strathclyde, Glasgow G1 1XQ, UK (b) Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China Article History: Received 16 March 2015; Revised 16 April 2015; Accepted 16 April 2015
  • Idioma: Inglês

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