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11-13 GHz electron cyclotron resonance plasma source using cylindrically comb-shaped magnetic-field configuration for broad ion-beam processing

Asaji, Toyohisa ; Kato, Yushi ; Sato, Fuminobu ; Iida, Toshiyuki ; Saito, Junji ; Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871 (Japan) ; Development Center of Advanced Technology, Tateyama Machine Co., Ltd., 30 Shimonoban, Toyama 930-1305 (Japan)]

Review of Scientific Instruments, 15 November 2006, Vol.77(11) [Periódico revisado por pares]

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