The influence of additives on electrical characteristics of DLC films deposited by reactive sputtering

Ronaldo Domingues Mansano 1964- Ana Paula Mousinho; Luís da Silva Zambom; Marina Sparvoli de Medeiros; Patrick Bernard Verdonck 1958-; M Guerino; Marcos Massi; International Symposium on Microelectronics Technology and Devices SBMICRO (19. 2004 Porto de Galinhas)

Santos, E. J. B.; Ribas, R. P.; Swart, J. eds Microelectronics technology and devices SBMicro 2004. Proceedings, v. 2004-03 Pennington : The Electrochemical Society, 2004

Pennington The Electrochemical Society 2004

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