Optical MEMS: From Micromirrors to Complex Systems
Solgaard, Olav ; Godil, Asif A. ; Howe, Roger T. ; Lee, Luke P. ; Peter, Yves-Alain ; Zappe, Hans
Journal of microelectromechanical systems, 2014-06, Vol.23 (3), p.517-538
[Periódico revisado por pares]
New York, NY: IEEE
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