High- Q Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners

Xiaoguang Liu ; Katehi, Linda P B ; Chappell, William J ; Peroulis, Dimitrios

Journal of microelectromechanical systems, 2010-08, Vol.19 (4), p.774-784 [Periódico revisado por pares]

New York, NY: IEEE

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