High- Q Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners
Xiaoguang Liu ; Katehi, Linda P B ; Chappell, William J ; Peroulis, Dimitrios
Journal of microelectromechanical systems, 2010-08, Vol.19 (4), p.774-784 [Periódico revisado por pares]New York, NY: IEEE
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